1000℃ Max Slideable RTP (4'' OD) Tube Furnace with Rapidly Heating & Cooling

Description：

KJ-1200X-RTP is an RTP (4'' OD) furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s and a cooling rate > 10°C/s. The furnace is designed for growing graphene and carbon nanotubes by CVD.

Specific Introduction:
KJ-1200X-RTP is an RTP (4'' OD) furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s and a cooling rate > 10°C/s. The furnace is designed for growing graphene and carbon nanotubes by CVD.

Technical parameters:

Furnace Structure	Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob. Vacuum flanges and the digital vacuum gauge are installed for immediate use. Annealing wafer up to 4" diameter
Max. Temperature	1000°C (<1 hour) 800°C (<2 hours) 600°C (continuous) Note: RTP furnaces should not be heated for long durations due to thin refractories.
Temperature Accuracy	± 2°C
Max. Heating Rate	≤50 ºC/s
Max. Cooling Rate	Cooling Rate from 900~200C: 8.3°C/sec (900 - 600°C); 4.4°C/sec (600°C - 500°C); 2.8°C/sec (500°C - 400°C); 1.6°C/sec (400°C - 300°C); 0.9°C/sec (300°C - 200°C);
Process Tube Size	High purity fused quartz tube Ø4.05" OD x 1400mm L Customizable
Sliding Rails / Table	Dual sliding rails made of Cr plated steel Sliding rail length: 1200 mm Driven by DC motor Customizable
Sliding Control	Automatic sliding is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling. Sliding Range: 340mm Sliding Speed: 0-70 mm/s; adjustable Customizable
Heating Elements	8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm) Customizable Standard working life: 2000 hrs. ( depends on heating rate ) The Halogen light tube is consumable. Please click picture left to order a spare one
Thermocouple	N type, 1/4" Dia x 24" length
Temperature Controller	PID automatic controller with 30 programmable segments for control of heating rate, cooling rate, and dwell time. Built-in overheating & thermocouple broken protection. Over-temperature protection and alarm allow for operation without attendant(s). ± 1 ºC temperature accuracy. RS485 Communications Port. PC Control: An MTS-02 control module is included for PC control on this furnace. The new version of PC module is now compatible with Lab View 05/08/2014 A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
Vacuum Flanges	Stainless steel vacuum flanges are installed on both ends of the tube. Right flange: Hinge-type flange for easy sample loading 1/4"diameter feedthrough for inserting K-type thermal couple Needle valve with barb gas fitting is built-in Left flange: The digital vacuum gauge is included KF25 right angle valve is installed for connecting to a vacuum pump Needle valve for vacuum release is included
Vacuum Level	Limited by a vacuum pump 10^-2 torr can be achieved by the mechanical pump 10^-4 torr can be reached by molecular pump The vacuum pump is not included, please order separately
Flow Meter	One flow-meter is built-in with range: 16-160 ml/min
Warranty	One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products page).